电子显微镜等样品冷却系统

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文档信息

【标题】电子显微镜等样品冷却系统

【发明人】 Ienaga  Katsuji 

【公开日期】1998-04-07

【分类号】H01J 3720,F25B 1900

【摘要】A cooling system for an electron microscope specimen comprises a refrigerant container, a passage for introducing the refrigerant into a heat-exchanging position, a flow rate-adjusting valve mounted in an exhaust passage and a control unit. The flow rate of gas produced by evaporation is adjusted by a rate-adjusting valve. The control unit establishes either a maximum flow rate mode for rapid cooling or a minimum flow rate mode for observation of an image.

【申请号】7382243

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