VHF Free-Free Beam High-Q Micromechanical Resonators

作者:Kun Wang 刊名: 上传者:徐钊毅

【摘要】Free-free beam; flexural-mode; micromechanical resonators utilizing non-intrusive supports to achieve measured Q’s as high as 8;400 at VHF frequencies from 30-90 MHz are demonstrated in a polysilicon surface micromachining technology. The microresonators feature torsional-mode support springs that effectively isolate the resonator beam from its anchors via quarter-wavelength impedance transformations; minimizing anchor dissipation and allowing these resonators to achieve high Q with high stiffness in the VHF frequency range. The free-free beam micromechanical resonators of this work are shown to have an order of magnitude higher Q than clamped-clamped beam versions with comparable stiffnesses.