利用离子源掺铁制备多层类金刚石膜

作者:马占吉;赵栋才;肖更竭;任妮;武生虎 刊名:真空科学与技术学报 上传者:朱红娟

【摘要】对离子源进行合理设计,使离子源中的Ar离子溅射产生Fe离子,利用裹挟Fe离子的Ar离子在制备类金刚石薄膜的过程中进行间歇性注入掺杂,制备多层类金刚石薄膜。这种多层类金刚石薄膜和单层类金刚石薄膜相比,应力从4.5 GPa降至3.9 GPa,摩擦系数从0.14降至0.1附近,同时保持硬度值不变。

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利用离子源掺铁制备多层类金刚石膜马占吉  赵栋才3 肖更竭  任  妮  武生虎(兰州物理研究所 ,表面工程技术国家重点实验室  兰州  730000) Deposition of Fe Ion2Implanted Diamond2Like Carbon Multilayers Ma Zhanji ,Zhao Dongcai3,Xiao Gengjie ,Ren Ni ,Wu Shenghu( National Key Lab of Surface Engineering ,Lanzhou Institute of Physics ,Lanzhou 730000, China)   Abstract  A novel technique has been successfully developed to grow Fe ion implanted diamond2like carbon (DLC)multi2layers ,with the modified linear ion sources (LIS) ,on Si (100) substrates. The Fe impurity ions ,generated in the specially designed ion source and accompanying the argon ions were implanted into one DLC layer previously grown by pulsed arc ion plating during argon ions sputtering and etching. The FeDLC multi2layers can be grown by alternating growth of DLC layer and Fe ion implantation. The microstructures and mechanical propertics of the FeDLC films were characterized with Xray photoelectron spectroscopy (XPS) and Raman spectroscopy. The results show that the Fe ionim2planted multilayer significantly improves its mechanical properties.As compared with the conventional DLCfilms ,its stress drops to 319 GPa from 415 GPa ;its friction coefficient is down to 01 from 0114 ,but its hardness remains unchanged.   Keywords  Diamond like2carbon(DLC) films ,Fe2doped ,multilayer ,mechanical properties   摘要  对离子源进行合理设计 ,使离子源中的 Ar 离子溅射产生 Fe 离子 ,利用裹挟 Fe 离子的 Ar 离子在制备类金刚石薄 膜的过程中进行间歇性注入掺杂 ,制备多层类金刚石薄膜。这种多层类金刚石薄膜和单层类金刚石薄膜相比 ,应力从 415 GPa 降至 319 GPa ,摩擦系数从 014 降至 011 附近 ,同时保持硬度值不变。 关键词  类金刚石

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