Meso-scale Machining Capabilities and Issues

作者:Gilbert L. Benavides,David P. Adams,Pin Yang 刊名: 上传者:史春晖

【摘要】Meso-scale manufacturing processes are bridging the gap between siliconbased MEMS processes and conventional miniature machining. These processes can fabricate two and three-dimensional parts having micron size features in traditional materials such as stainless steels; rare earth magnets; ceramics; and glass. Meso-scale processes that are currently available include; focused ion beam sputtering; micro-milling; micro-turning; excimer laser ablation; femto-second laser ablation; and micro electro discharge machining. These meso-scale processes employ subtractive machining technologies (i.e.; material removal); unlike LIGA; which is an additive mesoscale”process. Meso-scale processes have different material capabilities and machining performance specifications. Machining performance specifications of interest include minimum feature size; feature tolerance; feature location accuracy; surface finish; and material removal rate. Sandia National Laboratories is developing meso-scale electro-mechanical components; which require meso-scale parts that move relative to one another. The meso-scale parts fabricated by subtractive meso-scale manufacturing processes have unique tribology issues because of the variety of materials and the surface conditions produced by the different meso-scale manufacturing processes.